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重载真空兼容 6 轴六足位移台H-850.V


适用于重达 80 kg 的负载 负载能力达 80 kg 重复精度达 ±0.2 μm 行程范围达 ±50 mm / ±30° 适用于任何方向

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  • 产品描述
  • 规格
    • 商品名称: 重载真空兼容 6 轴六足位移台H-850.V
    • 商品编号: H-850.V
    • 概要介绍: 适用于重达 80 kg 的负载 负载能力达 80 kg 重复精度达 ±0.2 μm 行程范围达 ±50 mm / ±30° 适用于任何方向

    六足位移台适用于真空,H-850 系列定位负载高达 80 kg,具有高精度和可靠性。重型精密轴承适用于长工作周期的应用。

    The H-850.V适用于真空环境至10-6hPa。

    六个自由度的并联运动学设计使其比同类串行运动学系统更紧凑、更坚固。与串行系统(即堆叠系统)相比,其优势主要在于更好的路径精度和可重复性。此外,移动的质量更低,并允许改善所有运动轴的动态性能。电缆管理不是问题,因为电缆不会移动。

    PI Hexapod仿真工具

    仿真软件模拟了六足位移台的工作空间和负载能力的限制。因此,即使在购买之前,您也可以检查特定的六足位移台型号是否可以处理应用中发生的载荷、力和扭矩。为此,仿真工具考虑了六足位移台的位置和运动以及枢轴点和几个参考坐标系。

    应用领域

    工业和研究。用于天文学、光学定位、航空航天。

    关键词:
    • 重载
    • 位移
    • 仿真
    • 系统
    • 适用于
    • 移动
    • 应用
    • 负载
    • 真空
    • 工具
  • Motion H-850.G2V H-850.H2V Tolerance
    Active axes X Y Z θX θY θZ X Y Z θX θY θZ  
    Travel range in X ± 50 mm ± 50 mm  
    Travel range in Y ± 50 mm ± 50 mm  
    Travel range in Z ± 25 mm ± 25 mm  
    Rotation range in θX ± 15 ° ± 15 °  
    Rotation range in θY ± 15 ° ± 15 °  
    Rotation range in θZ ± 30 ° ± 30 °  
    Maximum velocity in X 2.5 mm/s 0.15 mm/s  
    Maximum velocity in Y 2.5 mm/s 0.15 mm/s  
    Maximum velocity in Z 2.5 mm/s 0.15 mm/s  
    Maximum angular velocity in θX 30 mrad/s 1.8 mrad/s  
    Maximum angular velocity in θY 30 mrad/s 1.8 mrad/s  
    Maximum angular velocity in θZ 30 mrad/s 1.8 mrad/s  
    Typical velocity in X 2 mm/s 0.1 mm/s  
    Typical velocity in Y 2 mm/s 0.1 mm/s  
    Typical velocity in Z 2 mm/s 0.1 mm/s  
    Typical angular velocity in θX 25 mrad/s 1.2 mrad/s  
    Typical angular velocity in θY 25 mrad/s 1.2 mrad/s  
    Typical angular velocity in θZ 25 mrad/s 1.2 mrad/s  
    Positioning H-850.G2V H-850.H2V Tolerance
    Minimum incremental motion in X 1 µm 0.3 µm typ.
    Minimum incremental motion in Y 1 µm 0.3 µm typ.
    Minimum incremental motion in Z 0.5 µm 0.2 µm typ.
    Minimum incremental motion in θX 7.5 µrad 3 µrad typ.
    Minimum incremental motion in θY 7.5 µrad 3 µrad typ.
    Minimum incremental motion in θZ 15 µrad 5 µrad typ.
    Unidirectional repeatability in X ± 0.5 µm ± 0.5 µm typ.
    Unidirectional repeatability in Y ± 0.5 µm ± 0.5 µm typ.
    Unidirectional repeatability in Z ± 0.2 µm ± 0.2 µm typ.
    Unidirectional repeatability in θX ± 3 µrad ± 3 µrad typ.
    Unidirectional repeatability in θY ± 3 µrad ± 3 µrad typ.
    Unidirectional repeatability in θZ ± 7.5 µrad ± 9 µrad typ.
    Backlash in X 6 µm 4 µm typ.
    Backlash in Y 6 µm 4 µm typ.
    Backlash in Z 1.5 µm 0.5 µm typ.
    Backlash in θX 25 µrad 7.5 µrad typ.
    Backlash in θY 25 µrad 7.5 µrad typ.
    Backlash in θZ 90 µrad 60 µrad typ.
    Integrated sensor Incremental rotary encoder Incremental rotary encoder  
    Drive Properties H-850.G2V H-850.H2V Tolerance
    Drive type DC gear motor with ActiveDrive DC gear motor with ActiveDrive  
    Nominal voltage 24 V 24 V  
    Mechanical Properties H-850.G2V H-850.H2V Tolerance
    Stiffness in X 7 N/µm 7 N/µm  
    Stiffness in Y 7 N/µm 7 N/µm  
    Stiffness in Z 100 N/µm 100 N/µm  
    Maximum load capacity, base plate in any orientation 10 kg 40 kg  
    Maximum load capacity, base plate horizontal 25 kg 80 kg  
    Maximum holding force, base plate in any orientation 85 N 500 N  
    Maximum holding force, base plate horizontal 250 N 2000 N  
    Drive screw type Ball screw Ball screw  
    Overall mass 17 kg 17 kg  
    Material

    Aluminum

    Aluminum

     
    Miscellaneous H-850.G2V H-850.H2V Tolerance
    Operating temperature range -10 to 50 °C -10 to 50 °C  
    Vacuum class 10⁻⁶ hPa 10⁻⁶ hPa  
    Maximum bakeout temperature 80 °C 80 °C  
    Connector for data transmission HD D-sub 78-pin (m) HD D-sub 78-pin (m)  
    Connector for supply voltage M12 4-pin (m) M12 4-pin (m)  
    Cable length 2 m 2 m  
    Recommended controllers / drivers

    C-887.5xx

    C-887.5xx