产品管理
  • 全部
  • 产品管理

Zθxθy三轴空气轴承磁性电机转台A-523


高性能 • 洁净室兼容 • 薄型 行程范围(Z 至 ±2.5 mm) 旋转范围为 θX、θY 至 ±1° 负载能力达 8 kg 平台直径 250 mm 总高度 60 mm

产品数据表下载:

undefined
undefined
+
  • undefined
  • undefined
  • 产品描述
  • 规格
    • 商品名称: Zθxθy三轴空气轴承磁性电机转台A-523
    • 商品编号: A-523
    • 概要介绍: 高性能 • 洁净室兼容 • 薄型 行程范围(Z 至 ±2.5 mm) 旋转范围为 θX、θY 至 ±1° 负载能力达 8 kg 平台直径 250 mm 总高度 60 mm

    产品概述

    A-523 是直接驱动的 Z 轴空气轴承倾斜/倾斜平台。该平台设计为平行运动多轴系统,可用于 Z 轴和倾斜/倾斜运动。该载物台以微型形式提供超高精度。非接触式组件的组合形成了一个无摩擦的运动平台,可提供卓越的性能、质量和使用寿命。

    当 A-523 与 A-81x 或 A-82x 系列控制器一起订购时,PI 会通过应用伺服调谐优化和施加负载来执行 Z 级的配置和布线。您将收到一个完整的、即用型的定位系统。

     

    附件和选件

    • 空气滤清器组
    • 内置真空夹紧机构

     

    应用领域

    Z 轴倾斜平台非常适合高精度应用,例如晶圆检测、光纤定位、光学定位、平板检测、无掩模光刻和 Ultra-LED 制造。非接触式设计是洁净室应用的理想选择。

    关键词:
    • 空气轴承
    • 倾斜
    • 平台
    • 应用
    • 运动
    • 定位
    • a-523
    • 设计
  • Specifications

    Motion A-523.25005B3 Tolerance
    Active axes Z θX θY  
    Travel range in Z 5 mm  
    Rotation range in θX 2 °  
    Rotation range in θY 1.6 °  
    Acceleration in Z, unloaded 10 m/s² max.
    Maximum velocity in Z, unloaded 200 mm/s  
    Yaw (Rotational crosstalk in θX with motion in Z) ± 25 µrad typ.
    Pitch (Rotational crosstalk in θY with motion in Z) ± 25 µrad typ.
    Positioning A-523.25005B3 Tolerance
    Minimum incremental motion in Z 0.01 µm typ.
    Minimum incremental motion in θX 0.06 µrad typ.
    Minimum incremental motion in θY 0.06 µrad typ.
    Positioning accuracy in Z, calibrated ± 0.5 µm typ.
    Positioning accuracy in θX, uncalibrated ± 15 µrad typ.
    Positioning accuracy in θY, uncalibrated ± 15 µrad typ.
    Bidirectional repeatability in Z 0.25 µm typ.
    Bidirectional repeatability in θX 8 µrad typ.
    Bidirectional repeatability in θY 8 µrad typ.
    Integrated sensor Absolute linear encoder  
    Sensor signal BiSS-C  
    Sensor resolution 1 nm  
    Drive Properties A-523.25005B3 Tolerance
    Drive type Ironless 3-phase linear motor  
    Nominal voltage 24 V  
    Peak voltage 60 V  
    Nominal current, RMS 1.4 A typ.
    Peak current, RMS 2.8 A typ.
    Force constant 5.9 N/A  
    Resistance phase-phase 5.2 Ω typ.
    Inductance phase-phase 1 mH  
    Back EMF phase-phase 4.2 V·s/m max.
    Pole pitch N-N 19.66 mm  
    Mechanical Properties A-523.25005B3 Tolerance
    Permissible push force in Z 80 N max.
    Guide Air bearing guide with air preload  
    Overall mass 8200 g  
    Material

    Hardcoat aluminum, stainless steel mounting hardware

     
    Miscellaneous A-523.25005B3 Tolerance
    Operating temperature range +15 to +25 °C  
    Connector HD D-sub 26-pin (m)  
    Air bearing connection Plug connection for hose with 6 mm outer diameter  
    Operating pressure 515 to 585 (75 to 85 psi) kPa  
    Air consumption 84 L/min max.
    Air quality Clean (filtered up to 1.0 µm or better) - ISO 8573–1 class 1 Oil free - ISO 8573–1 class 1 Dry (-15 °C dew point) - ISO 8573–1 class 3  
    Recommended controllers / drivers

    A-814 (four axes), A-82x (4 / 6 / 8 axes)

     

    Note on travel and rotation ranges: The travel range in Z and the rotation areas in θX and θY depend on each other. The values in the table show the maximum travel range for each axis, when all other axes are at the reference position. If one axis has reached its maximum position, movement of the other axes is not possible.

    Note on acceleration and velocity: The given values are valid in an unloaded state.

    Note on positioning accuracy: The calibrated accuracy can only be achieved with a controller-driven error compensation. The stage must be ordered with a controller from PI to reach these values. Accuracy values assume short duration and do not consider the long-term effects of thermal drift on the stage.

    Note on minimum incremental motion: Is directly related to the system stability (servo jitter); this depends on the servo drive used. The position stability can be improved by using ServoBoostTM PLUS on an ACS SPiiPlus controller.

    Note on the nominal and peak voltages and the nominal and peak currents: The given values apply per motor. The stage contains three motors.

    Note on the permissible push force: Assumes an operating pressure of 480 kPa of the air bearings. The stage is designed for horizontal operation only.

    Note on the operating pressure: To protect the stage against damage, it is recommended to connect an air pressure sensor to the E-Stop input of the controller.