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真空小型精密六足位移台H-811.I2V


快速、紧凑、高精度 行程范围达 ±17 mm / ±21° 负载能力达 5 kg 重复精度达 ±0.06 μm 速度可达 10 mm/s 真空度兼容 10-6百帕斯卡

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  • 产品描述
  • 规格
    • 商品名称: 真空小型精密六足位移台H-811.I2V
    • 商品编号: H-811.I2V
    • 概要介绍: 快速、紧凑、高精度 行程范围达 ±17 mm / ±21° 负载能力达 5 kg 重复精度达 ±0.06 μm 速度可达 10 mm/s 真空度兼容 10-6百帕斯卡

    精密级六轴定位系统

    六自由度并联运动设计使其比串联运动系统更加紧凑、更具刚性,动态范围更大,无移动电缆:更稳定、摩擦更小 真空兼容版本可达10-6百帕

    折叠驱动设计,外形紧凑

    应用领域

    科研和工业,标准和真空环境。用于显微操纵、生物技术、半导体制造

    关键词:
    • 位移
    • 紧凑
    • 运动
    • 系统
    • 设计
    • 真空
    • 范围
    • 移动
    • 折叠
    • 驱动
  • Specifications

    Motion H-811.I2V Tolerance
    Active axes X Y Z θX θY θZ  
    Travel range in X ± 17 mm  
    Travel range in Y ± 16 mm  
    Travel range in Z ± 6.5 mm  
    Rotation range in θX ± 10 °  
    Rotation range in θY ± 10 °  
    Rotation range in θZ ± 21 °  
    Maximum velocity in X 10 mm/s  
    Maximum velocity in Y 10 mm/s  
    Maximum velocity in Z 10 mm/s  
    Maximum angular velocity in θX 250 mrad/s  
    Maximum angular velocity in θY 250 mrad/s  
    Maximum angular velocity in θZ 250 mrad/s  
    Typical velocity in X 5 mm/s  
    Typical velocity in Y 5 mm/s  
    Typical velocity in Z 5 mm/s  
    Typical angular velocity in θX 120 mrad/s  
    Typical angular velocity in θY 120 mrad/s  
    Typical angular velocity in θZ 120 mrad/s  
    Positioning H-811.I2V Tolerance
    Unidirectional repeatability in X ± 0.15 µm typ.
    Unidirectional repeatability in Y ± 0.15 µm typ.
    Unidirectional repeatability in Z ± 0.06 µm typ.
    Unidirectional repeatability in θX ± 2 µrad typ.
    Unidirectional repeatability in θY ± 2 µrad typ.
    Unidirectional repeatability in θZ ± 3 µrad typ.
    Minimum incremental motion in X 0.2 µm typ.
    Minimum incremental motion in Y 0.2 µm typ.
    Minimum incremental motion in Z 0.08 µm typ.
    Minimum incremental motion in θX 2.5 µrad typ.
    Minimum incremental motion in θY 2.5 µrad typ.
    Minimum incremental motion in θZ 5 µrad typ.
    Backlash in X 0.2 µm typ.
    Backlash in Y 0.2 µm typ.
    Backlash in Z 0.06 µm typ.
    Backlash in θX 2 µrad typ.
    Backlash in θY 2 µrad typ.
    Backlash in θZ 4 µrad typ.
    Drive Properties H-811.I2V Tolerance
    Drive type Brushless DC motor  
    Mechanical Properties H-811.I2V Tolerance
    Stiffness in X 0.7 N/µm  
    Stiffness in Y 0.7 N/µm  
    Stiffness in Z 8 N/µm  
    Maximum holding force, base plate in any orientation 2.5 N  
    Maximum holding force, base plate horizontal 15 N  
    Overall mass 2.2 kg  
    Material

    Stainless steel, aluminum

     
    Maximum load capacity, base plate in any orientation 2.5 kg  
    Maximum load capacity, base plate horizontal 5 kg  
    Miscellaneous H-811.I2V Tolerance
    Operating temperature range 0 to 50 °C  
    Connector for supply voltage LEMO  
    Cable length 2 m  
    Recommended controllers / drivers

    C-887.5x

     
    Connector for data transmission HD D-sub 78-pin (m)  
    Vacuum class 10⁻⁶ hPa  
    Maximum bake out temperature 80 °C  
    Outer diameter power supply cable 4.7 mm  
    Minimum bending radius for fixed installation, power supply 50 mm  
    Outer diameter data transmission cable 6.6 mm  
    Minimum bending radius for fixed installation, data transmission 70 mm  

    Technical data specified at 22±3 °C.

    The maximum travel ranges of the individual coordinates (X, Y, Z, θX, θY, θZ) are interdependent. The data for each axis shows its maximum travel range when all other axes are in the zero position of the nominal travel range and the default coordinate system is in use, or rather when the pivot point is set to 0,0,0.

    For continuous operation in a vacuum, restrictions on operating parameters may be necessary due to heat generation.

    The cables fixed to the H-811.I2V are not drag chain compatible.

    Note on outer diameter data transmission cable: The data transmission connection consists of 2 cables that end in one connector. The specified diameter applies for each cable.

    Air-side connecting cables are not included in the scope of delivery and must be ordered separately.