带通孔高导向精度XY轴压电陶瓷扫描台P-734

P-734 XY压电扫描仪
超高精度轨迹控制，特别适用于表面分析和扫描显微镜
更佳的响应和多轴精度：并联运动/计量
行程为100微米×100微米
通光孔径56毫米 × 56毫米
电容式传感器可实现小于0.4纳米的分辨率
PICMA压电陶瓷促动器带来超长使用寿命

产品数据表下载：

品牌: 德国PI
商品名称: 带通孔高导向精度XY轴压电陶瓷扫描台P-734
商品编号: NXY-05 P-734
概要介绍: P-734 XY压电扫描仪 超高精度轨迹控制，特别适用于表面分析和扫描显微镜 更佳的响应和多轴精度：并联运动/计量 行程为100微米×100微米 通光孔径56毫米 × 56毫米 电容式传感器可实现小于0.4纳米的分辨率 PICMA压电陶瓷促动器带来超长使用寿命

Application fields

n Scanning microscopy

n Confocal microscopy

n Mask/wafer positioning

n Surface measuring technology

n Nanoimprinting

n Micromanipulation

n Image processing / stabilization

n Nanopositioning with high flatness and straightness of motion

Outstanding lifetime thanks to PICMA® piezo actuators

The PICMA® piezo actuators are all-ceramic insulated. This protects them against humidity and failure resulting from an increase

in leakage current. PICMA® actuators offer an up to ten times longer lifetime than conventional polymer-insulated actuators.

100 billion cycles without a single failure are proven.

Subnanometer resolution with capacitive sensors

Capacitive sensors measure with subnanometer resolution without contacting. They guarantee excellent linearity of motion,

long-term stability, and a bandwidth in the kHz range.

High guiding accuracy due to zero-play flexure guides

Flexure guides are free of maintenance, friction, and wear, and do not require lubrication. Their stiffness allows high load capa[1]

city and they are insensitive to shock and vibration. They work in a wide temperature range.

Automatic configuration and fast component exchange

Mechanics and controllers can be combined as required and exchanged quickly. All servo and linearization parameters are sto[1]

red in the ID chip of the D-sub connector of the mechanics. The autocalibration function of the digital controllers uses this data

each time the controller is switched on.

Maximum accuracy due to direct position measuring

Motion is measured directly at the motion platform without any influence from the drive or guide elements. This allows opti[1]

mum repeatability, outstanding stability, and stiff,fast-responding control.

High dynamics multi-axis operation due to parallel kinematics

In a parallel-kinematic multi-axis system, all actuators act on a common platform. The minimum mass inertia and the identical

design of all axes allow fast, dynamic, and nevertheless precision motion.

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